Scan barcode
154 pages • missing pub info (editions)
ISBN/UID: 9783642427558
Format: Paperback
Language: English
Publisher: Springer
Publication date: 20 September 2014
Description
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano ...
Community Reviews
Content Warnings
154 pages • missing pub info (editions)
ISBN/UID: 9783642427558
Format: Paperback
Language: English
Publisher: Springer
Publication date: 20 September 2014
Description
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano ...